On Robust Performance for Lightly Damped Systems: Non-normalized Coprime Factors and Weighting Function Design
نویسندگان
چکیده
Next-generation high-precision positioning systems are designed to be lightweight, in order to enable an increase of the speed of movement. Lightweight systems tend to have complex dynamical system behavior at frequencies relevant for control. This flexible dynamical behavior should be explicitly addressed during controller design to i) improve robustness with respect to model uncertainty and ii) suppress undesired vibrations of the wafer stage.
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